A study on deep etching of silicon using ethylene-diamine-pyrocatechol-water
Xian-Ping Wu, Quin-Hai Wu, Wen H. KoVolume:
9
Year:
1986
Language:
english
Pages:
11
DOI:
10.1016/0250-6874(86)80065-8
File:
PDF, 2.10 MB
english, 1986