The ammonia sensitivity of platinum-gate MOSFET devices:...

The ammonia sensitivity of platinum-gate MOSFET devices: dependence on gate electrode morphology

J.F. Ross, I. Robins, B.C. Webb
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Volume:
11
Year:
1987
Language:
english
Pages:
18
DOI:
10.1016/0250-6874(87)85006-0
File:
PDF, 1.44 MB
english, 1987
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