Anisotropic etching of silicon in hydrazine

Anisotropic etching of silicon in hydrazine

Mehran Mehregany, Stephen D. Senturia
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Volume:
13
Year:
1988
Language:
english
Pages:
16
DOI:
10.1016/0250-6874(88)80050-7
File:
PDF, 2.56 MB
english, 1988
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