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Silicon diaphragm pressure sensors fabricated by anodic oxidation etch-stop
Masaki Hirata, Kenichiro Suzuki, Hiroshi TanigawaVolume:
13
Year:
1988
Language:
english
Pages:
8
DOI:
10.1016/0250-6874(88)85029-7
File:
PDF, 939 KB
english, 1988