A piezoelectric micropump based on micromachining of...

Sensors and Actuators 1988 Vol. 15; Iss. 2

A piezoelectric micropump based on micromachining of silicon

H.T.G. van Lintel, F.C.M. van De Pol, S. Bouwstra
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Volume:
15
Year:
1988
Language:
english
Pages:
15
DOI:
10.1016/0250-6874(88)87005-7
File:
PDF, 1.14 MB
english, 1988
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