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Radio frequency magnetron sputtering growth and characterization of indium-tin oxide (ITO) thin films for NO2 gas sensors
G. Sberveglieri, S. Groppelli, G. CoccoliVolume:
15
Year:
1988
Language:
english
Pages:
8
DOI:
10.1016/0250-6874(88)87013-6
File:
PDF, 806 KB
english, 1988