Selective chemical vapor deposition of tungsten for microelectromechanical structures
N.C. Macdonald, L.Y. Chen, J.J. Yao, Z.L. Zhang, J.A. McMillan, D.C. Thomas, K.R. HaseltonVolume:
20
Year:
1989
Language:
english
Pages:
11
DOI:
10.1016/0250-6874(89)87110-0
File:
PDF, 1.37 MB
english, 1989