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Positron annihilation spectroscopy of the defect structure of sputter-deposited TiN
J.P. Schaffer, A.B. Dewald Jr., R.L. Frost, A.J. Perry, B. Nielsen, K.G. LynnVolume:
36
Year:
1988
Language:
english
Pages:
11
DOI:
10.1016/0257-8972(88)90002-3
File:
PDF, 753 KB
english, 1988