Production and characterization of boron nitride films obtained by R.F. magnetron sputtering and reactive ion-beam-assisted deposition
M. Elena, L. Guzman, S. GialanellaVolume:
36
Year:
1988
Language:
english
Pages:
8
DOI:
10.1016/0257-8972(88)90150-8
File:
PDF, 754 KB
english, 1988