Production and characterization of boron nitride films...

Production and characterization of boron nitride films obtained by R.F. magnetron sputtering and reactive ion-beam-assisted deposition

M. Elena, L. Guzman, S. Gialanella
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Volume:
36
Year:
1988
Language:
english
Pages:
8
DOI:
10.1016/0257-8972(88)90150-8
File:
PDF, 754 KB
english, 1988
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