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A comparison of the properties of hard carbon films produced by direct gas deposition and plasma-assisted evaporation
A. Dehbi-Alaoui, A.S. James, A. MatthewsVolume:
43-44
Year:
1990
Language:
english
Pages:
11
DOI:
10.1016/0257-8972(90)90063-i
File:
PDF, 570 KB
english, 1990