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Ion-assisted sputtering of TiN films
J. Musil, S. Kadlec, V. Valvoda, R. Kužel Jr., R. ČernýVolume:
43-44
Year:
1990
Language:
english
Pages:
11
DOI:
10.1016/0257-8972(90)90079-r
File:
PDF, 534 KB
english, 1990