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Oxygen ion beam assisted thin film deposition
Reese Puckett, Lawrence Stelmack, Stephen Michel, Michael J. O'Connell, Paul NatishanVolume:
41
Year:
1990
Language:
english
Pages:
9
DOI:
10.1016/0257-8972(90)90137-2
File:
PDF, 547 KB
english, 1990