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Titanium nitride coatings obtained using new apparatus for ion beam assisted deposition
M. Bonelli, L. Calliari, M. Elena, M.A. Ghabashy, L.A. Guzman, A. Miotello, P.M. OssiVolume:
49
Year:
1991
Language:
english
Pages:
5
DOI:
10.1016/0257-8972(91)90047-z
File:
PDF, 492 KB
english, 1991