Improved control of TiN coating properties using cathodic...

Surface and Coatings Technology 1991 Vol. 49; Iss. 1-3

Improved control of TiN coating properties using cathodic arc evaporation with a pulsed bias

W. Olbrich, J. Fessmann, G. Kampschulte, J. Ebberink
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Volume:
49
Year:
1991
Language:
english
Pages:
5
DOI:
10.1016/0257-8972(91)90065-5
File:
PDF, 499 KB
english, 1991
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