Abatement of CF4 and Associated Gas (NOx) with Combined Microwave Plasma and TiO2 Catalyst
Zhu, Xiao Mei, Sun, Bing, Xie, Hong Duan, Zhang, Lian Zheng, Zhao, Jia NiVolume:
356-360
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.356-360.1346
Date:
October, 2011
File:
PDF, 279 KB
english, 2011