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Physical properties of plasma-enhanced chemically vapour deposited hydrogenated and nitrogenated amorphous carbons
Martine Ricci, Michel Trinquecoste, Pierre DelhaesVolume:
47
Year:
1991
Language:
english
Pages:
9
DOI:
10.1016/0257-8972(91)90295-8
File:
PDF, 514 KB
english, 1991