Calculation and measurement of all (002) multiple diffraction peaks from a (001) silicon wafer
Hwang, Bing-HwaiVolume:
34
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/34/16/311
Date:
August, 2001
File:
PDF, 98 KB
english, 2001