Characterization of a TiN deposition process based on structural studies, plasma diagnostics and mathematical modelling
T. Czerwiec, M. Remy, H. MichelVolume:
59
Year:
1993
Language:
english
Pages:
6
DOI:
10.1016/0257-8972(93)90060-2
File:
PDF, 604 KB
english, 1993