Influence of plasma treatment conditions on growth and...

Surface and Coatings Technology 1993 Vol. 59; Iss. 1-3

Influence of plasma treatment conditions on growth and electrical properties of oxides on InP

A. Bouziane, M. Remy, Z. Ouennoughi, C. Simon, M. Alnot
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Volume:
59
Year:
1993
Language:
english
Pages:
5
DOI:
10.1016/0257-8972(93)90067-x
File:
PDF, 347 KB
english, 1993
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