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R.f. magnetron sputter deposition of Cr2O3 layers on ceramic Al2O3 substrates
U. Rothhaar, H. OechsnerVolume:
59
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0257-8972(93)90080-8
File:
PDF, 456 KB
english, 1993