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Plasma-assisted deposition of hard material layers from organometallic precursors
Ch. Täschner, K. Bartsch, A. LeonhardtVolume:
59
Year:
1993
Language:
english
Pages:
5
DOI:
10.1016/0257-8972(93)90084-2
File:
PDF, 439 KB
english, 1993