Topological effects regarding trench structures covered with LPCVD and PECVD thin films
J. Schlote, S. Hinrich, B. Kuck, K.-W. SchröderVolume:
59
Year:
1993
Language:
english
Pages:
5
DOI:
10.1016/0257-8972(93)90104-v
File:
PDF, 532 KB
english, 1993