Topological effects regarding trench structures covered...

Topological effects regarding trench structures covered with LPCVD and PECVD thin films

J. Schlote, S. Hinrich, B. Kuck, K.-W. Schröder
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Volume:
59
Year:
1993
Language:
english
Pages:
5
DOI:
10.1016/0257-8972(93)90104-v
File:
PDF, 532 KB
english, 1993
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