SiC-Si3N4 composite coatings produced by plasma-enhanced chemical vapour deposition
J. Gerretsen, G. Kirchner, T. Kelly, V. Mernagh, R. Koekoek, L. McDonnellVolume:
60
Year:
1993
Language:
english
Pages:
5
DOI:
10.1016/0257-8972(93)90154-g
File:
PDF, 535 KB
english, 1993