Dielectric and semiconducting Ge-C and Si-C thin films prepared by plasma deposition from organic compounds
J. Tyczkowski, P. Kazimierski, E. OdrobinaVolume:
60
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0257-8972(93)90162-h
File:
PDF, 313 KB
english, 1993