Study of the formation of a carbon layer on a sputtering target during magnetron-enhanced reactive sputtering
Pierre Vanden Brande, Stephane Lucas, René Winand, Lucien Renard, Alain WeymeerschVolume:
61
Year:
1993
Language:
english
Pages:
7
DOI:
10.1016/0257-8972(93)90218-d
File:
PDF, 714 KB
english, 1993