Porosity of thin diamond-like carbon films deposited by an...

Surface and Coatings Technology 1993 Vol. 62; Iss. 1-3

Porosity of thin diamond-like carbon films deposited by an arc discharge method

J. Koskinen, U. Ehrnstén, A. Mahiout, R. Lahtinen, J.-P. Hirvonen, S.-P. Hannula
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Volume:
62
Year:
1993
Language:
english
Pages:
5
DOI:
10.1016/0257-8972(93)90267-r
File:
PDF, 625 KB
english, 1993
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