Hardware and software for in-situ process monitor and...

Hardware and software for in-situ process monitor and control using multiple wavelength ellipsometry

Blaine Johs, David Doerr, Shakil Pittal, John A. Woollan, Ishwara Bhat, S. Dakshinamurthy
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Volume:
62
Year:
1993
Language:
english
Pages:
3
DOI:
10.1016/0257-8972(93)90318-i
File:
PDF, 262 KB
english, 1993
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