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Carbon overcoats with controlled properties: non-destructive ellipsometry evaluation
William A. McGahan, Tim Makovicka, Jeffrey Hale, John A. WoolamVolume:
62
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0257-8972(93)90324-h
File:
PDF, 300 KB
english, 1993