![](/img/cover-not-exists.png)
Temperature conditions during arc discharge plasma deposition of titanium nitride
S. Tamulevicˇius, K. Babilius, A. MatiukasVolume:
71
Year:
1995
Language:
english
Pages:
4
DOI:
10.1016/0257-8972(94)02324-j
File:
PDF, 348 KB
english, 1995