Chemical vapour deposition of TiO and Ti2O3 from TiCl4/H2/CO2 gas mixtures
Eva Fredriksson, Jan-Otto CarlssonVolume:
73
Year:
1995
Language:
english
Pages:
10
DOI:
10.1016/0257-8972(94)02378-6
File:
PDF, 1.06 MB
english, 1995