Effects of applied bias voltage on the properties of a-C:H...

Surface and Coatings Technology 1996 Vol. 78; Iss. 1-3

Effects of applied bias voltage on the properties of a-C:H films

Yin Dachuan, Xu Niankan, Liu Zhengtang, Han Yong, Zheng Xiulin
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Volume:
78
Year:
1996
Language:
english
Pages:
6
DOI:
10.1016/0257-8972(94)02387-5
File:
PDF, 463 KB
english, 1996
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