![](/img/cover-not-exists.png)
Material properties of ZrN film on silicon prepared by low-energy ion-assisted deposition
Susumu Horita, Mituru Kobayashi, Hiroshi Akahori, Tomonobu HataVolume:
66
Year:
1994
Language:
english
Pages:
5
DOI:
10.1016/0257-8972(94)90021-3
File:
PDF, 452 KB
english, 1994