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Variable energy r.f. quadrupole for high-energy ion implantation
Junya Ito, Katsumi Tokiguchi, Kensuke Amemiya, Noriyuki Sakudo, Satoru Yamada, Yasuo Hirao, Noboru TokudaVolume:
66
Year:
1994
Language:
english
Pages:
4
DOI:
10.1016/0257-8972(94)90031-0
File:
PDF, 406 KB
english, 1994