Non-destructive study of the ion-implantation-affected zone...

Surface and Coatings Technology 1994 Vol. 66; Iss. 1-3

Non-destructive study of the ion-implantation-affected zone (the long-range effect) in titanium nitride

Anthony J. Perry, James R. Treglio, James P. Schaffer, Jean Brunner, Vaclav Valvoda, David Rafaja
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Volume:
66
Year:
1994
Language:
english
Pages:
7
DOI:
10.1016/0257-8972(94)90034-5
File:
PDF, 533 KB
english, 1994
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