The ring plasma neutralizer for ion beam devices

The ring plasma neutralizer for ion beam devices

K. Kobayashi, N. Sakudo, K. Sakai, H. Koike
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Volume:
66
Year:
1994
Language:
english
Pages:
3
DOI:
10.1016/0257-8972(94)90063-9
File:
PDF, 302 KB
english, 1994
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