Determination of chemical composition and its relationship...

Determination of chemical composition and its relationship with optical properties of Ti-N and Ti-V-N sputtered thin films

C. Wiemer, F. Lévy, F. Bussy
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Volume:
68-69
Year:
1994
Language:
english
Pages:
7
DOI:
10.1016/0257-8972(94)90157-0
File:
PDF, 437 KB
english, 1994
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