Synthesis of aluminium nitride thin films by ion-vapour deposition method
Yoshikazu Nakamura, Yoshihisa Watanabe, Shigekazu Hirayama, Yuusaku NaotaVolume:
68-69
Year:
1994
Language:
english
Pages:
5
DOI:
10.1016/0257-8972(94)90161-9
File:
PDF, 865 KB
english, 1994