Synthesis of aluminium nitride thin films by ion-vapour...

Synthesis of aluminium nitride thin films by ion-vapour deposition method

Yoshikazu Nakamura, Yoshihisa Watanabe, Shigekazu Hirayama, Yuusaku Naota
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
68-69
Year:
1994
Language:
english
Pages:
5
DOI:
10.1016/0257-8972(94)90161-9
File:
PDF, 865 KB
english, 1994
Conversion to is in progress
Conversion to is failed