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Formation of TiN by nitridation of TiO2 films deposited by ultrasonically assisted sol-gel technique
C. Jiménez, M. LangletVolume:
68-69
Year:
1994
Language:
english
Pages:
4
DOI:
10.1016/0257-8972(94)90169-4
File:
PDF, 326 KB
english, 1994