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Improvement of thin film semiconductor conductivities using a transverse current during deposition
N. Parkansky, R.L. Boxman, S. Goldsmith, Y. Rosenberg, A. Ben-Shalom, L. Kaplan, D. ArbillyVolume:
68-69
Year:
1994
Language:
english
Pages:
5
DOI:
10.1016/0257-8972(94)90180-5
File:
PDF, 559 KB
english, 1994