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Study of the ion energy distribution during physical vapour deposition of TiN
M. Nesládek, C. Quaeyhaegens, S. Wouters, L.M. Stals, E. Bergmann, G. RettinghausVolume:
68-69
Year:
1994
Language:
english
Pages:
5
DOI:
10.1016/0257-8972(94)90183-x
File:
PDF, 503 KB
english, 1994