Structural, mechanical and tribological properties of...

Structural, mechanical and tribological properties of plasma-assisted chemically vapour deposited hydrogenated CxN1−x:H films

E.H.A. Dekempeneer, J. Meneve, J. Smeets, S. Kuypers, L. Eersels, R. Jacobs
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Volume:
68-69
Year:
1994
Language:
english
Pages:
5
DOI:
10.1016/0257-8972(94)90227-5
File:
PDF, 415 KB
english, 1994
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