![](/img/cover-not-exists.png)
Structural, mechanical and tribological properties of plasma-assisted chemically vapour deposited hydrogenated CxN1−x:H films
E.H.A. Dekempeneer, J. Meneve, J. Smeets, S. Kuypers, L. Eersels, R. JacobsVolume:
68-69
Year:
1994
Language:
english
Pages:
5
DOI:
10.1016/0257-8972(94)90227-5
File:
PDF, 415 KB
english, 1994