![](/img/cover-not-exists.png)
Deposition of molybdenum nitride thin films by r.f. reactive magnetron sputtering
V.P. Anitha, S. Major, D. Chandrashekharam, Mukesh BhatnagarVolume:
79
Year:
1996
Language:
english
Pages:
5
DOI:
10.1016/0257-8972(95)02425-5
File:
PDF, 597 KB
english, 1996