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Remote microwave plasma-enhanced chemical vapour deposition of insulating coatings (SiO2) on metallic substrates: film properties
C. Régnier, P. Tristant, J. DesmaisonVolume:
80
Year:
1996
Language:
english
Pages:
5
DOI:
10.1016/0257-8972(95)02679-7
File:
PDF, 773 KB
english, 1996