Neutron and soft X-ray multilayered mirrors deposited by triode sputtering using an automatic accurate thickness monitoring technique
C. Sella, M. Kaabouchi, O. Nemraoui, K.B. Youn, M. Mâaza, J.J. Bessot, P. SmutekVolume:
74-75
Year:
1995
Language:
english
Pages:
4
DOI:
10.1016/0257-8972(95)08259-x
File:
PDF, 334 KB
english, 1995