Partially reactive d.c. magnetron sputtering — a key to new...

Partially reactive d.c. magnetron sputtering — a key to new understanding of reactive plasma sputter deposition?

Gerhard Sobe
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Volume:
74-75
Year:
1995
Language:
english
Pages:
5
DOI:
10.1016/0257-8972(95)08342-1
File:
PDF, 412 KB
english, 1995
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