On the phase formation of titanium oxide thin films...

On the phase formation of titanium oxide thin films deposited by reactive DC magnetron sputtering: influence of oxygen partial pressure and nitrogen doping

Pandian, Ramanathaswamy, Natarajan, Gomathi, Rajagopalan, S., Kamruddin, M., Tyagi, A. K.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
116
Language:
english
Journal:
Applied Physics A
DOI:
10.1007/s00339-014-8351-1
Date:
September, 2014
File:
PDF, 868 KB
english, 2014
Conversion to is in progress
Conversion to is failed