Study on frequency stability of a linear-vibration MEMS...

Microsystem Technologies 2014 / 12 Vol. 20; Iss. 12

Study on frequency stability of a linear-vibration MEMS gyroscope

Wang, Wei, Zhang, Tingkai, Fan, Dongqing, Xing, Chaoyang
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Volume:
20
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-013-1951-4
Date:
December, 2014
File:
PDF, 967 KB
english, 2014
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