Calculating capacitance and analyzing nonlinearity of...

Microsystem Technologies 2014 / 06 Vol. 20; Iss. 6

Calculating capacitance and analyzing nonlinearity of micro-accelerometers by Schwarz–Christoffel mapping

He, Jiangbo, Xie, Jin, He, Xiaoping, Du, Lianming, Zhou, Wu, Wang, Libin
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Volume:
20
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-013-1955-0
Date:
June, 2014
File:
PDF, 1.59 MB
english, 2014
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