High-aspect-ratio nanoimprinted structures for a multi-pole...

Microsystem Technologies 2014 / 10 Vol. 20; Iss. 10-11

High-aspect-ratio nanoimprinted structures for a multi-pole magnetic scale

Xu, Zhi-Hao, Wu, Chien-Li, Sung, Cheng-Kuo, Wang, Sheng-Ching, Chin, Tsung-Shune
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Volume:
20
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-013-2014-6
Date:
October, 2014
File:
PDF, 635 KB
english, 2014
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