Improvement of measurement sensitivity near contact in...

Microsystem Technologies 2015 / 1 Vol. 21; Iss. 1

Improvement of measurement sensitivity near contact in intensity-interferometry flying height testers

Phetdee, Korakoch, Pimpin, Alongkorn, Srituravanich, Werayut
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Volume:
21
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-014-2146-3
Date:
January, 2015
File:
PDF, 881 KB
english, 2015
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